| Author | Search for: Li, Chengde1; Search for: Lee, Seongkuk1; Search for: Nikumb, Suwas1 |
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| Affiliation | - National Research Council of Canada. NRC Industrial Materials Institute
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| Format | Text, Technical Report |
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| Physical description | 20 p.: ill. |
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| Subject | Al2O3; femtosecond laser; via holes drilling |
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| Abstract | The topography, radial spreading and chemical composition of the slag produced during percussion and trepanning hole drilling process using femtosecond laser have been investigated. Results on optical microscopy, electron scanning microscopy and energy dispersion spectroscopy analysis are presented. While there is no significant difference in the average ablation rate between the near IR femtosecond laser in comparison to the UV nanosecond laser ablation of Al2O3 ceramics, near IR femtosecond laser provides better precision and quality. Absence of particulates due to resolidification of molten material around the hole was also observed. The slag consisted of ultrafind powder formed by the condensation of the supersaturated ablation plume. This slag can easily be removed using ultrasonic bath with the mixture of acetone and water. Combining the trepanning hole drilling method, femtosecond laser opens up a new door for production of high precision micro via holes in alumina wafers. |
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| Publication date | 2008 |
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| Publisher | National Research Council of Canada. Industrial Materials Institute |
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| Series | |
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| Language | English |
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| NRC number | NRCC 49166 |
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| NPARC number | 21274374 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 06125714-ba19-4245-93f7-b378529755f7 |
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| Record created | 2015-03-11 |
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| Record modified | 2022-09-13 |
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