| DOI | Resolve DOI: https://doi.org/10.1364/OL.36.002647 |
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| Author | Search for: Alonso-Ramos, C.; Search for: Ortega-Moñux, A.; Search for: Zavargo-Peche, L.; Search for: Halir, R.; Search for: De Oliva-Rubio, J.; Search for: Molina-Fernández, I.; Search for: Cheben, P.1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Xu, D.-X.1; Search for: Janz, S.1; Search for: Kim, N.1; Search for: Lamontagne, B.1 |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Subject | 3 dB bandwidth; additional costs; Bloch modes; coupling efficiency; device characterization; excitation field; fiber chip coupling; grating couplers; higher order; I-line steppers; multimodes; nanometrics; rib waveguides; silicon rib waveguides; silicon wire waveguides; silicon-on-insulators; wafer-scale; waveguide mode; silicon wafers; waveguides |
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| Abstract | Grating couplers are widely used as an efficient and versatile fiber-chip coupling structure in nanometric silicon wire waveguides. The implementation of efficient grating couplers in micrometric silicon-on-insulator (SOI) rib waveguides is, however, challenging, since the coupler waveguide region is multimode. Here we experimentally demonstrate grating couplers in 1:5 ?m-thick SOI rib waveguides with a coupling efficiency of ?2:2 dB and a 3 dB bandwidth of 40nm. An inverse taper is used to adiabatically transform the interconnection waveguide mode to the optimum grating coupler excitation field with negligible higher order Bloch mode excitation. Couplers are fabricated in the same etch step as the waveguides using i-line stepper lithography. The benefits of wafer-scale testing and device characterization without facet preparation are thus attained at no additional cost. © 2011 Optical Society of America. |
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| Publication date | 2011 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21271492 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 0d3a9249-5119-487c-8e41-4ad22c366e26 |
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| Record created | 2014-03-24 |
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| Record modified | 2020-04-21 |
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