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Thin films deposited at glancing incidence and their applications

From National Research Council Canada

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Affiliation
  1. National Research Council Canada. Nanotechnology
FormatText, Article
Publication date
PublisherVTCMAG
In
  • Vacuum Technology and Coating July 2001 (July 2001): 48–53.
LanguageEnglish
Peer reviewedYes
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Record identifier0f7026d1-50b3-4ddf-bd03-4644e97d29a9
Record created2021-09-27
Record modified2021-09-27
Date modified: