Athermal silicon subwavelength grating waveguides

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/GROUP4.2011.6053782
AuthorSearch for: ; Search for: 1; Search for: 1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: 1; Search for: 1; Search for: 1; Search for: 1; Search for: 1; Search for: 1; Search for: 1; Search for:
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Conference8th IEEE International Conference on Group IV Photonics, GFP 2011, 14 September 2011 through 16 September 2011, London
Subjectathermal; fabrication tolerances; grating; sub-wave length grating; sub-wavelength; thermo-optic coefficients; thermooptics; photonics; silicon; waveguides
Abstract
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LanguageEnglish
Peer reviewedYes
NPARC number21271484
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Record identifier1587542c-a570-4899-8c3a-69cd787b5168
Record created2014-03-24
Record modified2020-04-21
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