| Download | - View accepted manuscript: Self-consistent determination of line-width and probe shape using atomic force microscopy (PDF, 4.6 MiB)
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| DOI | Resolve DOI: https://doi.org/10.1088/0957-0233/24/8/085401 |
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| Author | Search for: Eves, B. J.1; Search for: Green, R. G.1 |
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| Affiliation | - National Research Council of Canada. Measurement Science and Standards
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| Format | Text, Article |
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| Subject | line-width; probe shape; atomic force microscopy; critical dimension |
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| Abstract | A self-consistent method for determining line-width and probe shape using an atomic force microscope (AFM) has been developed. Through acquisition of three images in which one tip images the other, and each tip images the sample a least-squares determination of the shapes of both tips, and the parameters that define the line-width standard can be determined. Application of the self-consistent method produces measurements that can be made traceable to the definition of the metre through appropriate calibration of the AFM. A comparison between the line-width determined by the method and a calibrated line-width standard shows good agreement. Sources of uncertainty specific to the self-consistent method are discussed. |
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| Publication date | 2013-07-02 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21268468 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 17d707e2-386b-4b84-8a4b-1763c01cc5b0 |
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| Record created | 2013-07-25 |
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| Record modified | 2020-06-04 |
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