NSC-NRC Collaborative Research Program: project status summary: advanced silicon processes for CMOS

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceThe 5th anniversary event of NSC-NRC Collaborative Research Program, June 24-25, 2002, Taipei, Taiwan
Publication date
In
LanguageEnglish
Peer reviewedYes
NPARC number23003965
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Record identifier1aff66af-810e-4125-b7eb-4c2f6ce800bd
Record created2018-08-27
Record modified2020-03-30
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