Practical magnetron sputtering system for the deposition of optical multilayer coatings

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FormatText, Article
Journal titleApplied Optics
ISSN0003-6935
Volume31
IssueJuly 19
Pages37843789
Publication date
Linkhttp://ao.osa.org/abstract.cfm?id=40045
LanguageEnglish
Identifier10010245
NRC numberNRC-INMS-765
NPARC number5765273
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Record identifier1b999396-8c53-440f-8f69-62eec4a749ee
Record created2009-03-29
Record modified2020-04-24
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