Practical magnetron sputtering system for the deposition of optical multilayer coatings

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PublisherOptica Publishing Group
Peer reviewedYes
NRC numberNRC-INMS-765
NPARC number5765273
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Record identifier1b999396-8c53-440f-8f69-62eec4a749ee
Record created2009-03-29
Record modified2023-09-29
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