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Growth and characterization of submicrometer regular arrays of pillars and helices

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. Nanotechnology
FormatText, Address
Conference46th National Symposium of American Vacuum Society, October 25-29, 1999, Seattle, Washington, United States
Publication date
PublisherAmerican Vacuum Society
LanguageEnglish
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Record identifier1ed185d2-941a-4885-a67d-989fc2d25b3b
Record created2021-09-27
Record modified2021-09-27
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