Thermal gradients integrated on-chip by passive radiative cooling of silicon nitride nanomechanical resonators

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DOIResolve DOI: https://doi.org/10.1016/j.applthermaleng.2023.120561
AuthorSearch for: ORCID identifier: https://orcid.org/0000-0003-3834-9411; Search for: 1ORCID identifier: https://orcid.org/0000-0003-0138-2904; Search for: ORCID identifier: https://orcid.org/0000-0002-3273-5680; Search for: 1; Search for: 1; Search for: 1; Search for:
Affiliation
  1. National Research Council of Canada. Metrology Research Centre
FunderSearch for: Natural Sciences and Engineering Research Council of Canada; Search for: National Research Council Canada
FormatText, Article
Subjectradiative cooling; nanomechanical resonator; silicon nitride; thermal gradient
Abstract
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PublisherElsevier
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LanguageEnglish
Peer reviewedYes
IdentifierS1359431123005902
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Record identifier20d8bf1b-088d-4281-8802-a4bf5e2f2af1
Record created2023-07-12
Record modified2023-07-12
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