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Proceedings of the 12th Canadian semiconductor technology conference

From National Research Council Canada

Alternative titlePapers from the 12th Canadian semiconductor technology conference
EditorSearch for: Py, Christophe1; Search for: Bardwell, Jennifer1
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Proceedings
Publication date
In
  • Journal of Vacuum Science and Technology A 24, no. 3 (May 2006): 587–891.
LanguageEnglish
NPARC number12346358
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Record identifier27eadd23-eaa9-4d03-b96e-eddb28a96cbe
Record created2009-09-17
Record modified2020-03-02
Date modified: