DOI | Resolve DOI: https://doi.org/10.1364/OE.20.018356 |
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Author | Search for: Ibrahim, Marc; Search for: Schmid, Jens H.1; Search for: Aleali, Alireza; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Lapointe, Jean1; Search for: Janz, Siegfried1; Search for: Bock, Przemek J.1; Search for: Densmore, Adam1; Search for: Lamontagne, Boris1; Search for: Ma, Rubin1; Search for: Xu, Dan-Xia1; Search for: Ye, Winnie N. |
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Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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Format | Text, Article |
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Subject | cladding material; duty cycles; grating pitch; silicon waveguide; SU-8 polymer; sub-wave length grating; thermooptic coefficients; TM polarization; cladding (coating); polarization; waveguides |
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Abstract | In this paper, athermal silicon waveguides using bridged subwavelength grating (BSWG) structures are proposed and investigated. The realization of temperature-independent BSWG waveguides for both polarizations is demonstrated numerically and experimentally. SU-8 polymer is used as the cladding material to compensate for the positive thermo-optic (TO) coefficient (dn/dT) of silicon. We investigate the dependence of the effective TO coefficient of BSWG waveguides on both the bridge width and grating duty cycle. The BSWG waveguides have a width of 490 nm, a height of 260 nm, and a grating pitch of 250 nm. Athermal behavior is achieved for both the transverse-magnetic (TM) and the transverse-electric (TE) polarized light for a variety of bridge width and duty cycle combinations. Furthermore, the BSWGs can be designed to be athermal for both TE and TM polarization simultaneously. © 2012 Optical Society of America. |
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Publication date | 2012 |
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In | |
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Language | English |
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Peer reviewed | Yes |
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NPARC number | 21269413 |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | 2bae0364-f8fe-4199-8766-0842e0c27a30 |
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Record created | 2013-12-12 |
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Record modified | 2020-04-21 |
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