| DOI | Resolve DOI: https://doi.org/10.1016/j.sse.2004.05.033 |
|---|
| Author | Search for: Sheng, S. R.1; Search for: McAlister, S. P.1; Search for: McCaffrey, J. P.2; Search for: Kovacic, S. J. |
|---|
| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
- National Research Council of Canada. NRC Institute for National Measurement Standards
|
|---|
| Format | Text, Article |
|---|
| Conference | International Semiconductor Device Research Symposium 2003 (ISDRS '03), 10-12 December 2003, Washington, D.C., USA |
|---|
| Publication date | 2004-07-08 |
|---|
| In | |
|---|
| Language | English |
|---|
| NRC number | NRC-INMS-784 |
|---|
| NPARC number | 8899116 |
|---|
| Export citation | Export as RIS |
|---|
| Report a correction | Report a correction (opens in a new tab) |
|---|
| Record identifier | 2ffbd289-4f54-421c-939c-dfbcba30b8d5 |
|---|
| Record created | 2009-04-22 |
|---|
| Record modified | 2020-04-17 |
|---|
