Magnetron sputter epitaxy of Gallium Nitride on (0001)sapphire

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.4028/www.scientific.net/MSF.264-268.1229
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Subjectepitaxy; magnetron; sputter-epitaxy; GaN; photoluminescence; X-ray; Raman; TEM
Publication date
In
LanguageEnglish
NPARC number12337926
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Record identifier304dd6b5-0695-4265-8fb7-c78901487ca4
Record created2009-09-10
Record modified2020-03-20
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