| Download | - View accepted manuscript: Transition of MEMS Technology to Nanofabrication (PDF, 1.2 MiB)
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| DOI | Resolve DOI: https://doi.org/10.1166/jnn.2005.129 |
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| Author | Search for: Luesebrink, Helge; Search for: Glinsner, Thomas; Search for: Jakeway, Stephen C.; Search for: Crabtree, H. J; Search for: Cameron, Neil S.; Search for: Roberge, Helene1; Search for: Veres, Teodor1 |
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| Affiliation | - National Research Council of Canada. NRC Industrial Materials Institute
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| Format | Text, Article |
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| Abstract | The transition of MEMS technology to nano fabrication is a solution to the growing demand for smaller and highdensity feature sizes in the nanometer scale. Techniques for fabricating μm-, and nm-features will be discussed, and results achieved with nanoimprinting technologies will be presented. |
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| Publication date | 2005-06-01 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NRC number | NRCC 47610 |
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| NPARC number | 15959398 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 32bf373e-a00d-48a7-893e-0e2c18968ca7 |
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| Record created | 2010-11-02 |
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| Record modified | 2020-04-07 |
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