Polyimide nanostructures fabricated by nanoimprint lithography and its application as flexible imprint mould

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Affiliation
  1. National Research Council of Canada. NRC Industrial Materials Institute
FormatText, Article
ConferenceThe 31th International Conference on Micro- and Nano-Engineering (MNE2005), Vienna, Austria, September 19-22, 2005
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LanguageEnglish
Peer reviewedNo
NRC numberNRCC 48969
NPARC number15966891
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Record identifier337b2333-9311-439c-88e6-54da3c8e2664
Record created2010-11-02
Record modified2020-04-07
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