Self-reducible copper (II) source reagents for chemical vapor deposition of copper metal

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
FormatText, Article
ConferenceThe 5th anniversary event of NSC-NRC Collaborative Research Program, June 24-25, 2002, Taipei, Taiwan
Publication date
In
LanguageEnglish
Peer reviewedYes
NPARC number23003960
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Record identifier33e8cbf8-8190-4ddd-87eb-fb791889c95d
Record created2018-08-27
Record modified2020-03-30
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