| DOI | Resolve DOI: https://doi.org/10.1109/LPT.2009.2030689 |
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| Author | Search for: Halir, R.1; Search for: Ortega-Monux, A.; Search for: Molina-Fernadez, I.; Search for: Wanguemert-Perez, J.G.; Search for: Cheben, P.1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Xu, Dan-Xia1; Search for: Lamontagne, B.1; Search for: Janz, S.1 |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Subject | optical device fabrication; optical planar waveguide couplers; optical waveguide components |
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| Abstract | We demonstrate compact multimode interference (MMI) couplers on silicon-on-insulator that exhibit both high performance and relaxed tolerances. The devices are fabricated with a single shallow etch step on 1.5-mum-thick silicon, and have a footprint of 12.8 mum times 456 mum, including 100-mum-long tapers at input and output. In a Mach-Zehnder configuration, we achieve an extinction ratio larger than 22 dB for transverse-electric polarization and larger than 20 dB for transverse-magnetic polarization. This extinction ratio is maintained in the full 1520- to 1580-nm band and for MMI width variations in a range of 0.45 mu m. We also show appreciable tolerance differences between paired and general excitation MMIs. |
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| Publication date | 2009-11 |
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| Publisher | IEEE Photonics Society |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 23004594 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 34d7af51-c30c-4b03-aadb-2c435f59abf3 |
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| Record created | 2018-11-26 |
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| Record modified | 2021-09-17 |
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