| Download | - View final version: Metamaterial-engineered silicon beam splitter fabricated with deep UV immersion lithography (PDF, 874 KiB)
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| DOI | Resolve DOI: https://doi.org/10.3390/nano11112949 |
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| Author | Search for: Vakarin, Vladyslav; Search for: Melati, DanieleORCID identifier: https://orcid.org/0000-0002-3427-0186; Search for: Dinh, Thi Thuy Duong; Search for: Le Roux, Xavier; Search for: Kan, Warren Kut King; Search for: Dupré, Cécilia; Search for: Szelag, Bertrand; Search for: Monfray, Stéphane; Search for: Boeuf, Frédéric; Search for: Cheben, Pavel1; Search for: Cassan, Eric; Search for: Marris-Morini, Delphine; Search for: Vivien, Laurent; Search for: Alonso-Ramos, Carlos Alberto |
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| Affiliation | - National Research Council of Canada. Advanced Electronics and Photonics
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| Format | Text, Article |
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| Physical description | 8 p. |
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| Subject | subwavelength grating; metamaterial; silicon photonics; multi-mode interference coupler; beam splitter |
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| Abstract | Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication constraints, such as minimum feature size, that restrict the available design space or compromise compatibility with high-volume fabrication technologies. Indeed, most successful SWG realizations so far relied on electron-beam lithographic techniques, compromising the scalability of the approach. Here, we report the experimental demonstration of an SWG metamaterial engineered beam splitter fabricated with deep-ultraviolet immersion lithography in a 300-mm silicon-on-insulator technology. The metamaterial beam splitter exhibits high performance over a measured bandwidth exceeding 186 nm centered at 1550 nm. These results open a new route for the development of scalable silicon photonic circuits exploiting flexible metamaterial engineering. |
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| Publication date | 2021-11-03 |
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| Publisher | MDPI |
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| Licence | |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 37d804ad-6f60-45f8-a055-8927d16fe255 |
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| Record created | 2022-10-31 |
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| Record modified | 2022-10-31 |
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