Evaluation of electron tomography reconstruction methods for interface roughness measurement

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1002/jemt.23006
AuthorSearch for: 1; Search for: ; Search for: 1
EditorSearch for: Verkade, Paul
Name affiliation
  1. National Research Council of Canada. Nanotechnology
FormatText, Article
Subjectburied interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices
Publication date
Peer reviewedYes
NPARC number23002836
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier397db106-39cc-4754-9031-903da3bda758
Record created2018-03-09
Record modified2020-03-16
Date modified: