| DOI | Resolve DOI: https://doi.org/10.1002/jemt.23006 |
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| Author | Search for: Hayashida, Misa1; Search for: Ogawa, Shinichi; Search for: Malac, Marek1 |
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| Editor | Search for: Verkade, Paul |
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| Affiliation | - National Research Council of Canada. Nanotechnology
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| Format | Text, Article |
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| Subject | buried interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices |
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| Abstract | We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values. We investigate the applicability of the dose fractionation theorem by evaluating the effect of an increasing number of images, i.e., decreasing tilt increment size at fixed total electron irradiation dose on the quantitative measurement of buried interface roughness. The results indicate that SIRT is the most suitable method for reconstruction and a 3° to 5° angle is optimal for the roughness measurement. |
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| Publication date | 2018-02-21 |
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| Publisher | Wiley |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 23002836 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 397db106-39cc-4754-9031-903da3bda758 |
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| Record created | 2018-03-09 |
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| Record modified | 2020-03-16 |
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