Modeling of Large Area Hot Embossing

From National Research Council Canada

Download
  1. (PDF, 949 KiB)
AuthorSearch for: ; Search for: 1; Search for: 1; Search for: 1; Search for:
Affiliation
  1. National Research Council of Canada. NRC Industrial Materials Institute
FormatText, Article
ConferenceSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Stresa, Italy, April 25-27, 2007
Publication date
In
LanguageEnglish
Peer reviewedYes
NRC numberNRCC 53651
NPARC number15820156
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier3ade097f-12b0-452d-b202-a4aaf2abb18a
Record created2010-07-19
Record modified2020-05-10
Date modified: