Single etch grating couplers for mass fabrication with DUV lithography

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1007/s11082-012-9563-2
AuthorSearch for: ; Search for: ; Search for: 1; Search for: 1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: 1; Search for: 1; Search for: 1; Search for: 1; Search for: ; Search for: ; Search for: ; Search for:
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Subjectfiber-to-chip grating coupler; deep ultraviolet lithography; single etch process
Abstract
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In
LanguageEnglish
Peer reviewedYes
Identifier9563
NPARC number21268395
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Record identifier3ae6e66a-103d-4df0-8445-37629981b59d
Record created2013-07-10
Record modified2020-04-21
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