Fully automated hot embossing processes utilizing high resolution working stamps

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/j.mee.2009.11.098
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Name affiliation
  1. National Research Council Canada. NRC Industrial Materials Institute
FormatText
TypeArticle
Journal titleMicroelectronic Engineering
ISSN0167-9317
1873-5568
Volume87
Pages1037–1040
Subjecthot embossing; soft working stamps; de-embossing; spin-on layer; high resolution
Abstract
Nanoimprint lithography (NIL) is a fast replication technology for structures with sizes ranging from micrometer down to few nanometers range. This paper describes the technology for imprinting of polymer substrates as well as spin-on polymers by using soft working stamp materials. A fully automated hot embossing system, the EVG®750 was built to use this rapid replication processes. By utilizing soft working stamps, we demonstrate the possibility to replicate, in fully automated mode, both high-aspect ratio features in thermoplastic materials as needed for microfluidic lab-on-chip applications as well as high resolution features down to 50 nm in polymer that can be used as templates for pattern transfer in the fabrication of plasmonic substrates for bio-sensing applications.
Publication date
PublisherElsevier
LanguageEnglish
Peer reviewedYes
NPARC number23002043
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