Silicon nitride CMOS platform for integrated optical phased arrays applications

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/GFP51802.2021.9673980
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: 1; Search for:
Affiliation
  1. National Research Council of Canada. Advanced Electronics and Photonics
FunderSearch for: Engineering and Physical Sciences Research Council
FormatText, Article
Conference2021 IEEE 17th International Conference on Group IV Photonics (GFP), December 7-10, 2021, Malaga, Spain
Subjectphased arrays; integrated optics; laser radar; optical switches; silicon nitride; optical sensors; optical modulation
Abstract
Publication date
PublisherIEEE
In
LanguageEnglish
Peer reviewedYes
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier4582b8f5-0957-42d6-94a4-7275b434aa7f
Record created2023-04-27
Record modified2023-04-27
Date modified: