Uniformity of AlGaN/GaN HEMTs Grown by Ammonia-MBE on 2-inch Sapphire Substrate

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1149/1.1940808
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number12744369
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Record identifier48c15dac-b6dc-4528-9953-f661aa4e7a05
Record created2009-10-27
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