Fabrication of Lithographically-defined Optical Coupling Facets for SOI Waveguides by ICP Etching

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.2186657
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Institute for Information Technology
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NPARC number12744384
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Record identifier4980ac5f-1212-416c-bf01-b2425458ec48
Record created2009-10-27
Record modified2020-04-22
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