Selected porosification of n-InP(100) after focused ion beam implantation of Si

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1002/pssa.200306496
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
PublisherWiley
In
LanguageEnglish
Peer reviewedYes
NPARC number12744689
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Record identifier49b91a83-04a9-49ed-b278-b524f16c9cd9
Record created2009-10-27
Record modified2020-04-02
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