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Fabrication of submicrometer regular arrays of pillars and helices

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.591046
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FormatText, Article
Subjectbismuth; copper; periodic structures; photonic band gap; scanning electron microscopy; titanium; vacuum deposition
Abstract
We use a glancing-angle deposition technique to produce regular lattices of submicrometer pillars and helices with a two-dimensional lattice constant below 1 μm and structure heights of 0.5–10 μm. Possible applications of such structures include photonic crystals and magnetic-storage media.
Publication date
PublisherAmerican Vacuum Society
In
  • Journal of Vacuum Science & Technology B 17, no. 6: 2671–2674.
LanguageEnglish
Peer reviewedYes
NRC publication
This is a non-NRC publication

"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.

NPARC number12339118
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Record identifier4b7cc940-d12f-4a57-a990-7348ee09990a
Record created2009-09-11
Record modified2020-10-07
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