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Laser Applications in Microelectronic and Optoelectronic Manufacturing V

From National Research Council Canada

Linkhttps://www.spie.org/Publications/Proceedings/Volume/3933?SSO=1
EditorSearch for: Helvajian, H.; Search for: Sugioka, K.; Search for: Gower, M. C.; Search for: Dubowski, J.1
Affiliation
  1. National Research Council of Canada. NRC Institute for Chemical Process and Environmental Technology
FormatText, Proceedings
ConferenceSPIE Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing V, January 24, 2000, San Jose, CA, USA
Publication date
PublisherSPIE
Series
  • Proceedings of SPIE 3933 (7 June 2000).
LanguageEnglish
Peer reviewedYes
NPARC number12346532
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Record identifier4b9fe280-c459-44cf-93ad-c89ed2d0a7c2
Record created2009-09-17
Record modified2024-02-05
Date modified: