Comparison of processes in radio-and microwave frequency plasmas by optical emission spectroscopy
Comparison of processes in radio-and microwave frequency plasmas by optical emission spectroscopy
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Affiliation |
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Format | Text, Article |
Conference | 10th International Symposium on Plasma Chemistry, August 4-9, 1991, Bochum, Germany |
Publication date | 1991 |
In | |
Language | English |
Peer reviewed | Yes |
NPARC number | 21277527 |
Export citation | Export as RIS |
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Record identifier | 4d9a46b7-2307-4abc-b648-dbd308fa9e4d |
Record created | 2016-04-05 |
Record modified | 2020-03-17 |
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