Comparison of processes in radio-and microwave frequency plasmas by optical emission spectroscopy
Comparison of processes in radio-and microwave frequency plasmas by optical emission spectroscopy
Author | Search for: Poitras, Daniel1; Search for: Küttel, O. M.; Search for: Raveh, Avi; Search for: Klemberg-Sapieha, J. E.; Search for: Martinu, Ludvik; Search for: Wertheimer, M. R. |
---|---|
Name affiliation |
|
Format | Text, Article |
Conference | 10th International Symposium on Plasma Chemistry, August 4-9, 1991, Bochum, Germany |
Publication date | 1991 |
In | |
Language | English |
Peer reviewed | Yes |
NPARC number | 21277527 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | 4d9a46b7-2307-4abc-b648-dbd308fa9e4d |
Record created | 2016-04-05 |
Record modified | 2020-03-17 |
- Date modified: