Comparison of processes in radio-and microwave frequency plasmas by optical emission spectroscopy
Comparison of processes in radio-and microwave frequency plasmas by optical emission spectroscopy
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| Format | Text, Article |
| Conference | 10th International Symposium on Plasma Chemistry, August 4-9, 1991, Bochum, Germany |
| Publication date | 1991 |
| In | |
| Language | English |
| Peer reviewed | Yes |
| NPARC number | 21277527 |
| Export citation | Export as RIS |
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| Record identifier | 4d9a46b7-2307-4abc-b648-dbd308fa9e4d |
| Record created | 2016-04-05 |
| Record modified | 2020-03-17 |
- Date modified: