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Very High Density RF MIM Capacitors Compatible with VLSI

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceIntl Microwave Symposium, 2005
NPARC number12346698
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Record identifier4e567e27-555e-446b-8e3a-a3b89131a5d3
Record created2009-09-17
Record modified2020-04-16
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