Diamond-like-carbon films produced by magnetically guided pulsed laser deposition

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DOI	Resolve DOI: https://doi.org/10.1007/s003390101009
Author	Search for: Minami, H.; Search for: Manage, D.; Search for: Tsui, Y. Y.; Search for: Fedosejevs, R.; Search for: Malac, M.; Search for: Egerton, R.
Format	Text, Article
Abstract	We have compared the quality of carbon films deposited with magnetically guided pulsed laser deposition (MGPLD) and conventional pulsed laser deposition (PLD). In MGPLD, a curved magnetic field is used to guide the plasma but not the neutral species to the substrate to deposit the films while, in conventional PLD, the film is deposited with a mixture of ions, neutral species and clusters. A KrF laser pulse (248 nm) was focused to intensities of 10 GW/cm2 on a carbon source target and a magnetic field strength of 0.3 T was used to steer the plasma around a curved arc to the deposition substrate. Electron energy loss spectroscopy was used in order to measure the fraction of sp3 bonding in the films produced. It is shown that the sp3 fraction, and hence the diamond-like character of the films, increased when deposited only with the pure ion component by MGPLD compared with films produced by the conventional PLD technique. The dependence of film quality on the laser intensity is also discussed.
Publication date	2001-10-02
In	Applied Physics A 73, no. 5: 531–534.
Language	English
Peer reviewed	Yes
NRC publication	This is a non-NRC publication "Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.
NPARC number	12327004
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Record identifier	4eabdf00-cfbd-4b96-96a0-d16303de73d1
Record created	2009-09-10
Record modified	2020-03-27

Date modified:: 2025-11-17