Photoablation and surface modification of polymers with the excimer laser radiation

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1007/978-94-015-8104-2_14
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Name affiliation
  1. National Research Council of Canada. Security and Disruptive Technologies
FormatText, Book chapter
Book titleExcimer Lasers
Series titleNATO ASI Series
ISSN0168-132X
ISBN978-90-481-4395-5
978-94-015-8104-2
Pages201–219
Abstract
The excimer laser radiation has been used for more than ten years to study the ablation and surface modification of polymeric materials. Most of common polymers display strong absorption of the ArF and KrF radiations. The model of the moving interface describes the ablation behaviour with two coefflcients which are the ablation rate constant k and the screening coefficient ß. Both k and ß depend on polymer, wavelength and pulse duration and are determined by fitting the experimental ablation curves. The parameters have been successfully analyzed for a variety of different polymers. Correlations are found with the aromaticity of the polymer. The model of the moving interface can be used to evaluate the energy which is left on the surface after ablation, as for instance in the case of Mylar surface amorphization.
Publication date
PublisherSpringer
LanguageEnglish
Peer reviewedYes
NPARC number23000912
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Record identifier59169e45-12de-4953-b729-af23015f6c93
Record created2016-11-10
Record modified2020-06-11
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