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Sub-micron high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.1475981
AuthorSearch for: ; Search for: ; Search for: 1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: 1; Search for: 1; Search for: 1
Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Journal of Vacuum Science & Technology A 20, no. 3: 1079–.
LanguageEnglish
Peer reviewedYes
NPARC number12744810
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Record identifier59f464fb-9fef-4646-ad65-58ec91fe9bc5
Record created2009-10-27
Record modified2020-03-30
Date modified: