Other chemical vapor generation techniques

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/B978-0-323-85834-2.00013-6
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Affiliation
  1. National Research Council of Canada. Metrology Research Centre
FormatText, Book Chapter
Subjectvolatile halides; metal carbonyls; volatile oxides; volatile metal chelates; volatile metal esters
Abstract
Publication date
PublisherElsevier
In
LanguageEnglish
Peer reviewedYes
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Record identifier5b56a1ff-e37f-4cab-a5fe-a6802751b407
Record created2023-07-04
Record modified2023-07-04
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