| Abstract | Dynamic performance of high-precision laser micromachining systems is determined by the dynamic characteristics of the processes, which significantly influence the final quality of the machined part. Herein, a systematic approach ties together the four main factors associated with the dynamic processes, which play an important role during laser micromachining. These processes are: a) the kinematic/dynamic disturbances within the workpiece motion system, b) the space-time fluctuations of the laser beam, c) the laser material interaction as a dynamic process, and d) the forming of the workpiece surface as a dynamic process. This paper deals with preliminary experimental results on the system's dynamic performance with respect to non-uniformity in the feed motion and final machined surface profile. A generalized mathematical model of the laser micromachining system dynamics is presented. This novel approach to dynamic performance analysis of a high-precision laser micromachining system as an entire system is developed for diagnostics, control, and process optimization purposes. |
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