Molecular beam epitaxy synthesis of Si1−yCy and Si1−x−yGexCy alloys and Ge islands using an electron cyclotron resonance argon/methane plasma
Molecular beam epitaxy synthesis of Si1−yCy and Si1−x−yGexCy alloys and Ge islands using an electron cyclotron resonance argon/methane plasma
| DOI | Resolve DOI: https://doi.org/10.1016/S0040-6090(02)00241-9 |
|---|---|
| Author | Search for: 1; Search for: 1; Search for: ; Search for: 1; Search for: 1; Search for: 1 |
| Affiliation |
|
| Format | Text, Article |
| Publication date | 2002 |
| In | |
| NPARC number | 12744507 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 5eea226a-6188-4545-86ad-a76767dc187b |
| Record created | 2009-10-27 |
| Record modified | 2020-03-30 |
- Date modified: