Fabrication of a variable diffraction efficiency phase mask by multiple dose ion implantation

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.588283
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceThe 39th International symposium on electron, ion, and photon beams, Scottsdale, Arizona, USA, May 30 - June 2, 1995
SubjectBRAGG REFLECTION; DIFFRACTION GRATINGS; FIBER OPTICS; ION IMPLANTATION; MASKING; RADIATION DOSES; SILICON IONS; SILICON OXIDES
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LanguageEnglish
NPARC number12339096
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Record identifier66cc1517-32cb-41fd-b50d-3868155b7408
Record created2009-09-11
Record modified2020-04-29
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