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Determination of the thickness of thin anodic oxides on GaAs using AFM, profilometry, TEM, XPS and SIMS

From National Research Council Canada

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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
  2. National Research Council Canada. NRC Institute for National Measurement Standards
FormatText, Article
ConferenceProceedings of the 3rd International Conference on the Microscopy of Oxidation, 16-18 September 1996, held at Trinity Hall, the University of Cambridge, UK
Publication date
In
  • Microscopy of oxidation 3: Proceedings of the Third International Conference on the Microscopy of Oxidation (September 1996).
NPARC number12327648
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Record identifier6c29fe2c-5be3-4874-bf1e-5ed2e91ebc5a
Record created2009-09-10
Record modified2020-03-20
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