Electrical isolation of electrodes with submicron separation in a digital optical switch

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.2167976
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number12743970
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Record identifier6f0354b5-643c-4c49-b9fb-0f8c0950c5f2
Record created2009-10-27
Record modified2020-04-22
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