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Room temperature deposition of ITO using r.f. magnetron sputtering

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0040-6090(02)00425-X
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Thin Solid Films 413, no. 1-2 (2002): 181–185.
NPARC number12744715
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Record identifier6f37ef24-058a-4252-a589-d1f81cdd172d
Record created2009-10-27
Record modified2020-03-30
Date modified: