Novel lateral cavity MSM photodetectors on SOI substrates using silicides in Silicon-based and hybrid optoelectronics

Alternative title	SPIE
Author	Search for: Janz, Siegfried¹; Search for: Xu, D-X; Search for: Cheben, Pavel¹ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Delâge, André¹
Affiliation	National Research Council Canada. NRC Institute for Microstructural Sciences
Format	Text, Article
Conference	SPIE Photonics West, 2001, San Jose, CA
NPARC number	12346182
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Record identifier	81e395a3-d7df-4c1f-bf41-10bd83f96fc3
Record created	2009-09-17
Record modified	2020-04-16