Matrix effects in sims depth profiles of SiGe superlattices

DOI	Resolve DOI: https://doi.org/10.1016/0168-583X(90)90907-C
Author	Search for: Jackman, J. A.; Search for: Dignard-Bailey, L.; Search for: Storey, R. S.; Search for: MacPherson, C.; Search for: Rolfe, S.; Search for: van der Zwan, L.; Search for: Jackamn, T. E.
Format	Text, Article
Conference	Ninth International Conference on Ion Beam Analysis, June 26-30, 1989, Kingston, Ontario, Canada
Publication date	1990-01-02
Publisher	Elsevier
In	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 45, no. 1-4 (2 January 1990): 592–596.
Language	English
NRC number	NRC-INMS-4347
NPARC number	8896706
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Record identifier	82439d9f-fbfb-4556-acea-a9b4f45d72f4
Record created	2009-04-22
Record modified	2024-02-13

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