| Abstract | For ultra-precision laser micromachining, the need to control the process is very high because the operator has to make a host of complex decisions, based on trial-and-error methods, to set process control parameters related to the laser, workpiece material, and motion system. In addition, factors such as power fluctuations, intensity distribution, and thermal effects, not controlled by the operator, also influence the machining process. Further, the problem of choosing the optimal process parameters becomes more complicated when parts and features dimensions become smaller (less than a few tens of microns), and the thermodynamic processes within machining zone could significantly change the part geometry. To produce parts with nano/micro-scale geometric quality, using laser micro-processing technologies, a thorough understanding of the machining process and control of the entire system performance is essential. This paper describes a method for geometric quality analysis and process control aimed at improving the accuracy, precision, and surface finish of laser machined micro parts with dimensions less than 100 µm using simulation of surface profile and analysis of the machining system performance. |
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