Asymmetrical dual-cavity filters and their application to thickness uniformity monitoring

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1364/OE.11.003393
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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number12744818
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Record identifier874070b3-213c-42f8-86be-0a2286af7c3d
Record created2009-10-27
Record modified2020-04-02
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