Imaging laser diffractometer for traceable grating pitch calibration
Imaging laser diffractometer for traceable grating pitch calibration
DOI | Resolve DOI: https://doi.org/10.1088/0957-0233/18/2/S08 |
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Format | Text, Article |
Publication date | 2007 |
In | |
Language | English |
NRC number | NRC-INMS-4040 |
NPARC number | 8900416 |
Export citation | Export as RIS |
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Record identifier | 88041e7b-c9be-4a05-92f5-af5b15f213c2 |
Record created | 2009-04-22 |
Record modified | 2020-05-10 |
- Date modified: