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Silicides for ULSI technology

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Physics in Canada 52, no. 5 (1996): 227–230.
LanguageEnglish
NPARC number12339283
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Record identifier8b6827ec-915c-46bf-a60b-920bc41ee517
Record created2009-09-11
Record modified2020-03-20
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