| DOI | Resolve DOI: https://doi.org/10.1016/j.ultramic.2009.11.003 |
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| Author | Search for: Egerton, R. F.1; Search for: McLeod, R.1; Search for: Wang, F.1; Search for: Malac, M.1 |
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| Affiliation | - National Research Council of Canada. National Institute for Nanotechnology
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| Format | Text, Article |
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| Conference | International Workshop on Enhanced Data Generated by Electrons : EDGE 2009, 17-22 May, 2009, Banff, Alberta, Canada |
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| Subject | TEM; radiation damage; sputtering; knock-on displacement |
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| Abstract | Although the theory of high-angle elastic scattering of fast electrons is well developed, accurate calculation of the incident-energy threshold and cross section for surface-atom sputtering is hampered by uncertainties in the value of the surface-displacement energy Ed and its angular dependence. We show that reasonable agreement with experiment is achieved by assuming a non-spherical escape potential with Ed=(5/3) Esub, where Esub is the sublimation energy. Since field-emission sources and aberration-corrected TEM lenses have become more widespread, sputtering has begun to impose a practical limit to the spatial resolution of microanalysis for some specimens. Sputtering can be delayed by coating the specimen with a thin layer of carbon, or prevented by reducing the incident energy; 60 keV should be sufficiently low for most materials. |
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| Publication date | 2009-11-18 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 19734713 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 901c7966-0730-43ee-a9bd-cf9a6b567aa3 |
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| Record created | 2012-03-30 |
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| Record modified | 2020-04-16 |
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