Development of optical monitor for control of thin-film deposition
Development of optical monitor for control of thin-film deposition
| DOI | Resolve DOI: https://doi.org/10.1364/AO.25.003645 |
|---|---|
| Author | Search for: ; Search for: ; Search for: |
| Format | Text, Article |
| Publication date | 1986-10 |
| Publisher | Optica Publishing Group |
| In | |
| Language | English |
| Peer reviewed | Yes |
| NRC number | NRC-INMS-1018 |
| NPARC number | 8896731 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 979811d5-e148-41a6-adae-39e869d681fa |
| Record created | 2009-04-22 |
| Record modified | 2023-09-29 |
- Date modified: