Sub-second humidity sensing based on nanostructured narrow-bandpass optical filters

From National Research Council Canada

DOI	Resolve DOI: https://doi.org/10.1557/PROC-0915-R07-01
Author	Search for: Steele, John Jeremiah; Search for: Van Popta, Andy C.; Search for: Hawkeye, Matthew M.; Search for: Sit, Jeremy C.; Search for: Brett, Michael J.
Format	Text, Article
Abstract	An optical-based humidity sensor with a sub-second response time was fabricated from a nanostructured titanium dioxide thin film. A refractive index profile designed to yield a narrow-bandpass optical interference filter was obtained through nanoscale porosity variations produced by glancing angle deposition (GLAD). Under varying humidity conditions the transmittance spectrum of the filter shifts due to effective index changes of the porous structure resulting from adsorption/desorption of water vapor. In the following we will show that this device is highly sensitive, exhibits minimal hysteresis, and is extremely fast. The adsorption and desorption response times were measured to be 270 ms and 160 ms, respectively.
Publication date	2006-05-16
Publisher	Springer
In	Symposium R: Nanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications, 0915-R07-01 (2005).
Series	MRS Online Proceedings Library 915.
Peer reviewed	Yes
NRC publication	This is a non-NRC publication "Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.
NRC number	NRC-NINT-267
NPARC number	8926088
Export citation	Export as RIS
Report a correction	Report a correction (opens in a new tab)
Record identifier	986b459d-edda-401c-b86b-00b0046d4790
Record created	2009-04-23
Record modified	2021-06-28

Date modified:: 2025-06-13