Metallic NEMS components fabricated from nanocomposite Al-Mo films
Metallic NEMS components fabricated from nanocomposite Al-Mo films
| Format | Text, Article |
|---|---|
| Publication date | 2006 |
| In | |
| Peer reviewed | Yes |
| NRC number | 166 |
| NPARC number | 8926110 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 9f0ec49f-6e0d-49c3-84e9-5707c9efca5d |
| Record created | 2009-04-23 |
| Record modified | 2020-04-22 |
- Date modified: